Miniaturized confocal Raman microscopy based on MEMS mirror scanning

Guozhuo Zhang; Xu Wang; Han Cui; Weiqian Zhao

doi:10.1117/12.2655747

9 January 2023 Miniaturized confocal Raman microscopy based on MEMS mirror scanning

Guozhuo Zhang, Xu Wang, Han Cui, Weiqian Zhao

Proceedings Volume 12316, Advanced Optical Imaging Technologies V; 123160J (2023) https://doi.org/10.1117/12.2655747
Event: SPIE/COS Photonics Asia, 2022, Online Only

Conference Poster

Abstract

Confocal Raman microscopy can provide molecular distribution and three-dimensional topographic information of the substances, and is widely used in biomedical, material chemistry and physical science fields. However, in the traditional confocal Raman microscopes, the devices have large size, and scan lens and tube lens need conjugate placement taking up a lot of space, these make it difficult to reduce the size of the system. In order to solve the mentioned problems, we propose a scanning mechanism based on MEMS scanning mirror without scan lens and tube lens, and develop a miniature confocal Raman microscope base on this mechanism. In which the MEMS scanning mirror is used for lateral two-dimensional scanning of the laser beam, and an aspherical lens is placed directly behind the MEMS scanning mirror as the objective, as well as the MEMS mirror is positioned at the back focal plane of the aspherical lens to obtain a better spatial resolution. Compared with the traditional confocal Raman microscope based on galvanometer scanning, a miniaturized MEMS scanning mirror is used in our system, and scan lens and tube lens are omitted, which greatly reduces the size of this system. Meanwhile, the reduction of optical components and the shortening of the optical length improve the signal detection efficiency, which is very beneficial for the detection of relatively weak Raman spectral signals. The preliminary experimental results demonstrate the system lateral resolution and axial resolution are about 0.8 μm and 5.5 μm, respectively, and the Raman spectral resolution is 0.2 nm, which is basically consistent with the theoretical analysis.

Citation Download Citation

Guozhuo Zhang, Xu Wang, Han Cui, and Weiqian Zhao "Miniaturized confocal Raman microscopy based on MEMS mirror scanning", Proc. SPIE 12316, Advanced Optical Imaging Technologies V, 123160J (9 January 2023); https://doi.org/10.1117/12.2655747

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
POSTER

DOWNLOAD POSTER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Confocal microscopy

Raman spectroscopy

Microelectromechanical systems

Mirrors

Microscopy

Microscopes

Spectral resolution

Show All Keywords

Keywords/Phrases

Search In:

Publication Years