Paper
14 October 2022 Efficient preparation of graphene/ruthenium oxide micro-supercapacitors using spatially shaped femtosecond laser method
Junhao Huang
Author Affiliations +
Proceedings Volume 12343, 2nd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2022); 123430M (2022) https://doi.org/10.1117/12.2648649
Event: 2nd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2022), 2022, Qingdao, China
Abstract
As the industrial demand for micro energy storage devices increases, the efficient preparation of micro-supercapacitors has become a focus. Here we demonstrated a one-step, high-precision and high-efficiency processing method for the preparation of micro-supercapacitors. The graphene/RuO2 micro-supercapacitor was successfully fabricated by means of a spatially shaped femtosecond laser method, with a single spatially shaped laser pulse capable of processing an area hundreds of times larger than that of the initial Gaussian laser. The prepared single graphene/ RuO2 micro-supercapacitor exhibits excellent capacitance (66.4 mF/cm2 and 221.5 F/cm3). This method enables high precision and high efficiency processing of composite micro-supercapacitors, which has high potential for industrial.
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Junhao Huang "Efficient preparation of graphene/ruthenium oxide micro-supercapacitors using spatially shaped femtosecond laser method", Proc. SPIE 12343, 2nd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2022), 123430M (14 October 2022); https://doi.org/10.1117/12.2648649
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KEYWORDS
Femtosecond phenomena

Laser processing

Ruthenium

Capacitance

Graphene

Electrodes

Oxides

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