Large-scale 2D Surface-Micromachined Optical Ultrasound Transducer (SMOUT) array for 3D computed tomography

Zhiyu Yan; Jun Zou

doi:10.1117/12.2649277

9 March 2023 Large-scale 2D Surface-Micromachined Optical Ultrasound Transducer (SMOUT) array for 3D computed tomography

Zhiyu Yan, Jun Zou

Author Affiliations +

Proceedings Volume 12379, Photons Plus Ultrasound: Imaging and Sensing 2023; 123790K (2023) https://doi.org/10.1117/12.2649277
Event: SPIE BiOS, 2023, San Francisco, California, United States

Abstract

This paper reports a 2D surface-micromachined optical ultrasound transducer (SMOUT) array consisting of 350 × 350 elements based on Fabry-Perot interferometry. The uniformity of the SMOUT array is characterized by mapping the optical performance of the elements. The center frequency, acoustic bandwidth, and noise equivalent pressure (NEP) of the elements are determined to be 3.5 MHz, 5 MHz, and 20.7 Pa over a bandwidth of 10 MHz, respectively. PACT based on the SMOUT array is conducted to demonstrate the imaging capability. With these features, SMOUT array could provide a promising solution for achieving high-speed 3D PACT applications.

Conference Presentation

Citation Download Citation

Zhiyu Yan and Jun Zou "Large-scale 2D Surface-Micromachined Optical Ultrasound Transducer (SMOUT) array for 3D computed tomography", Proc. SPIE 12379, Photons Plus Ultrasound: Imaging and Sensing 2023, 123790K (9 March 2023); https://doi.org/10.1117/12.2649277

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