Design and implementation of plenoptic imaging system with reduced aberrations

Chih-Hao Lin; Po-Ming Lin; Ming-Fu Chen

doi:10.1117/12.2649522

16 May 2023 Design and implementation of plenoptic imaging system with reduced aberrations

Chih-Hao Lin, Po-Ming Lin, Ming-Fu Chen

Proceedings Volume 12385, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXX; 123850D (2023) https://doi.org/10.1117/12.2649522
Event: SPIE BiOS, 2023, San Francisco, California, United States

Conference Poster

Abstract

Industrial inspection is critical for 3D semiconductor manufacturing process and automated optical inspection for 3D ICs has attracted a lot of attention in these years. Plenoptic imaging systems, based on a micro-lens array, acquire light field from parallax and computes 3D information with lower costs. To reduce aberrations from the optical design with microlens array, especially for off-axial micro lenses, the design flow for plenoptic imaging systems is proposed. Based on the parameters designed from paraxial approximation, lateral image quality is optimized by a commercial optical design software, and then depth-related performances are estimated from the simulated images of the optical system. The experimental system for validation is tested quantitatively with modulation transfer function (MTF), by the slanted-edge method of ISO 12233. The difference of MTF between the paraxial and off-axial regions is approximately 0.02, which is within the repeatability error 0.03. Moreover, the synthesized images of a PCIe card refocused on the chip and the board clearly show the elements at the refocusing depth only. The depth map and the all-in-focus image are estimated to build a 3D model. However, significant artifacts appear on depth maps when lighting is not uniform. With combination of the ring light and coaxial light, the depth maps of objects with different surface properties can be estimated with less artifacts. Furthermore, accuracy and resolution can be enhanced by deep-learning technologies, which will be implemented in the future.

Citation Download Citation

Chih-Hao Lin, Po-Ming Lin, and Ming-Fu Chen "Design and implementation of plenoptic imaging system with reduced aberrations", Proc. SPIE 12385, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXX, 123850D (16 May 2023); https://doi.org/10.1117/12.2649522

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available