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17 March 2023 Flexible polymer packaged high-Q WGM resonators for displacement detection
Jie Liao, Abraham J. Qavi, Maxwell R. Adolphson, Lan Yang
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Proceedings Volume 12424, Integrated Optics: Devices, Materials, and Technologies XXVII; 124241I (2023) https://doi.org/10.1117/12.2667579
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
Whispering Gallery Mode (WGM) sensors provide high sensitivity, high resolution, small footprint, and resistance to electromagnetic interference, making them a great option for displacement sensing. An efficient method of coupling light into and out of WGM resonators is through the use of tapered tapers, but their instability can be a limitation in practical applications. Conventional packaging methods for WGM resonators use UV-curable polymers with low refractive indices to improve robustness, but their rigidity can make them less suitable for displacement sensing. Additionally, their high cost, potential toxicity and the interference from ambient moisture pose a critical issue. In this study, we demonstrate an alternative method of packaging WGM devices using non-toxic polydimethylsiloxane (PDMS). The Q-factor of 107 is achieved at the 780 nm band. The PDMS packaging technique not only improves the robustness and compactness of the WGM device, but also enhances humidity resistance significantly. By take advantages of the unique flexibility of PDMS, we demonstrate displacement detection with a high sensitivity of ~0.1 pm/μm and a detection limit of 600 nm.
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Jie Liao, Abraham J. Qavi, Maxwell R. Adolphson, and Lan Yang "Flexible polymer packaged high-Q WGM resonators for displacement detection", Proc. SPIE 12424, Integrated Optics: Devices, Materials, and Technologies XXVII, 124241I (17 March 2023); https://doi.org/10.1117/12.2667579
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KEYWORDS
Whispering gallery modes
Polydimethylsiloxane
Polymers
Packaging
Sensors
Resonators
Microresonators
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