Temperature compensated strain sensor in fused silica by femtosecond laser inscription

Viktor Geudens; Shahryar Nategh; Geert Van Steenberge; Jan Belis; Jeroen Missinne

doi:10.1117/12.2646975

15 March 2023 Temperature compensated strain sensor in fused silica by femtosecond laser inscription

Viktor Geudens, Shahryar Nategh, Geert Van Steenberge, Jan Belis, Jeroen Missinne

Proceedings Volume 12433, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI; 1243306 (2023) https://doi.org/10.1117/12.2646975
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Measuring strain without parasitic thermal influence is vital. A temperature compensated strain sensor is fabricated in fused silica using femtosecond laser micromachining. Utilizing femtosecond laser direct writing and femtosecond irradiation followed by chemical etching, two Bragg gratings are fabricated in the bulk of a fused silica substrate. By suspending one of the Bragg gratings in a cantilever, it is mechanically isolated from the rest of the substrate. Thermal and tensile characterization showed that both Bragg gratings are sensitive to thermal changes with a sensitivity around 10.5 pm/°C, while only the non-isolated Brag grating is sensitive to strain with a sensitivity of 1.1 pm/µϵ. Hence, it is proven that the parasitic thermal influence on the strain sensor can be compensated by taking into account the response of the isolated Bragg grating.

Conference Presentation

Citation Download Citation

Viktor Geudens, Shahryar Nategh, Geert Van Steenberge, Jan Belis, and Jeroen Missinne "Temperature compensated strain sensor in fused silica by femtosecond laser inscription", Proc. SPIE 12433, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI, 1243306 (15 March 2023); https://doi.org/10.1117/12.2646975

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