Pushing deep greyscale lithography beyond 100-µm pattern depth with a novel photoresist

Christine Schuster; Gerda Ekindorf; Anja Voigt; Arne Schleunitz; Gabi Grützner

doi:10.1117/12.2661526

30 April 2023 Pushing deep greyscale lithography beyond 100-µm pattern depth with a novel photoresist

Christine Schuster, Gerda Ekindorf, Anja Voigt, Arne Schleunitz, Gabi Grützner

Proceedings Volume 12497, Novel Patterning Technologies 2023; 124970P (2023) https://doi.org/10.1117/12.2661526
Event: SPIE Advanced Lithography + Patterning, 2023, San Jose, California, United States

Abstract

Greyscale lithography for the manufacture of complex 2.5D and freeform microstructures in photoresists receives increasing attention from industry for the fabrication of advanced micro-optical elements. The thus obtained structures serve as master or template for different methods of pattern transfer into materials for final, permanent applications, such as refractive and diffractive lenses, blazed gratings, beam-shapers etc. However, many such applications require large structure heights beyond 100 μm which was not easily accessible until now. We present a novel photoresist, mr-P 22G_XP, enabling greyscale lithography of very deep patterns. Issues limiting the pattern depth caused by the photoresist chemistry were addressed. Greyscale pattern depths of 120 μm were possible with an easily accessible set-up with this prototype, with a well-considered choice of photoresist ingredients, and lithography process adjustments focusing on laser direct writing, with the prospect of even deeper patterns up to 140–150 μm.

Citation Download Citation

Christine Schuster, Gerda Ekindorf, Anja Voigt, Arne Schleunitz, and Gabi Grützner "Pushing deep greyscale lithography beyond 100-µm pattern depth with a novel photoresist", Proc. SPIE 12497, Novel Patterning Technologies 2023, 124970P (30 April 2023); https://doi.org/10.1117/12.2661526

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available