Precision machining technology of high quality factor hemispherical resonator

Junhan Liu; Tianliang Qu; Changxin Xiong

doi:10.1117/12.2655926

9 January 2023 Precision machining technology of high quality factor hemispherical resonator

Junhan Liu, Tianliang Qu, Changxin Xiong

Proceedings Volume 12507, Advanced Optical Manufacturing Technologies and Applications 2022; and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022); 125071L (2023) https://doi.org/10.1117/12.2655926
Event: 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022), 2022, Changchun, China

Abstract

Hemispherical resonator gyro is a novel type of high-precision and high reliability inertial grade solid gyro. In addition to have the features of simple structure, reduction in the number of parts, small volume, light-weight, stable performance, strong anti-interference ability, no need of temperature compensation, which makes it widely used in inertial system. The hemispherical resonator is the core component of high-precision hemispherical resonator gyro. The effect factors affecting the precision of hemispherical resonator gyro are roundness, concentricity, roughness, quality factor (Q factor) and frequency splitting after the hemispherical resonator is machined. The processing method and strictly process control determine the precision and Q factor of the hemispherical resonator. The loss of hemispherical resonator is discussed. The mechanical loss factors of hemispherical resonator include surface loss, thermal elastic loss, anchor loss and internal friction loss. The limiting factors of hemispherical resonator Q factor are surface quality, processing stress and geometrical structure. The structure of hemispherical resonator is designed using Corning 7979 fused silica as material. The designed surface roughness should be less than 0.02μm, the roundness and concentricity should be less than 0.3μm. Comprehensively considering theoretical precision and engineering application, we proposed a set of precision machining technology, including precision machining, precision polishing, and chemical etching. Using such technology, the roundness of resonator sphere is 0.17μm, the surface roughness of resonator sphere is 15.2nm, Q factor is 3.11× 10⁷.

Citation Download Citation

Junhan Liu, Tianliang Qu, and Changxin Xiong "Precision machining technology of high quality factor hemispherical resonator", Proc. SPIE 12507, Advanced Optical Manufacturing Technologies and Applications 2022; and 2nd International Forum of Young Scientists on Advanced Optical Manufacturing (AOMTA and YSAOM 2022), 125071L (9 January 2023); https://doi.org/10.1117/12.2655926

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Resonators

Polishing

Optical spheres

Wet etching

Silica

Surface roughness

Surface finishing

Show All Keywords

Keywords/Phrases

Search In:

Publication Years