Achieving unprecedented scale and cost effectiveness with microbolometers on glass

John Hong; Sean Andrews; Edward Chan; Tallis Chang; Yaoling Pan; Heesun Shin; Bing Wen

doi:10.1117/12.2666249

13 June 2023 Achieving unprecedented scale and cost effectiveness with microbolometers on glass

John Hong, Sean Andrews, Edward Chan, Tallis Chang, Yaoling Pan, Heesun Shin, Bing Wen

Proceedings Volume 12534, Infrared Technology and Applications XLIX; 125341E (2023) https://doi.org/10.1117/12.2666249
Event: SPIE Defense + Commercial Sensing, 2023, Orlando, Florida, United States

Abstract

We report on a new manufacturing paradigm to build scalable microbolometers at the lowest cost possible. A VGA microbolometer focal plane array has been designed and fabricated using flat panel display production tools, using the Large Area MEMS Platform (LAMP). Complex MEMs sensors have been integrated with Low Temperature Polysilicon (LTPS) transistors on a Gen 3.5 glass substrate in a display production fab to realize an order of magnitude gain in the number of devices per substrate. In this modular approach, a custom readout integrated circuit (ROIC) is bonded to the glass focal plane with the Chip on Flex (COF) technique, a high volume and low-cost staple of the display industry. We discuss the potential implications of the pricing disruption to important commercial applications.

Conference Presentation

Citation Download Citation

John Hong, Sean Andrews, Edward Chan, Tallis Chang, Yaoling Pan, Heesun Shin, and Bing Wen "Achieving unprecedented scale and cost effectiveness with microbolometers on glass", Proc. SPIE 12534, Infrared Technology and Applications XLIX, 125341E (13 June 2023); https://doi.org/10.1117/12.2666249

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