Silicon and silicon nitride based bilayer polarization-insensitive optical filter

Nannan Ning; Xiaofei Wang; Qikai Huang; Hui Yu; Yuehai Wang; Jianyi Yang

doi:10.1117/12.2643367

23 January 2023 Silicon and silicon nitride based bilayer polarization-insensitive optical filter

Nannan Ning, Xiaofei Wang, Qikai Huang, Hui Yu, Yuehai Wang, Jianyi Yang

Proceedings Volume 12556, AOPC 2022: Optoelectronics and Nanophotonics; 125560B (2023) https://doi.org/10.1117/12.2643367
Event: Applied Optics and Photonics China 2022 (AOPC2022), 2022, Beijing, China

Abstract

A polarization-insensitive optical filter based on silicon and silicon nitride film is demonstrated. The lateral-shift apodization is introduced to suppress the sidelobes. The fabricated optical filter shows polarization-insensitive performances with large 3dB-bandwidths of 3.5–5.1 nm, low losses of 1.72-1 dB, decent SLSRs of 18.5-19.1 dB for both polarizations.

Citation Download Citation

Nannan Ning, Xiaofei Wang, Qikai Huang, Hui Yu, Yuehai Wang, and Jianyi Yang "Silicon and silicon nitride based bilayer polarization-insensitive optical filter", Proc. SPIE 12556, AOPC 2022: Optoelectronics and Nanophotonics, 125560B (23 January 2023); https://doi.org/10.1117/12.2643367

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