Influence of metasurface on the performance of vacuum photoelectric devices

Heng Zhao; Yaobin Li; Qian Guo; Yanni Gong; Yijin Wang; Yun Wang; Jinneng Zeng; Jiaojiao Li; Xiaofeng Li

doi:10.1117/12.2663127

12 April 2023 Influence of metasurface on the performance of vacuum photoelectric devices

Heng Zhao, Yaobin Li, Qian Guo, Yanni Gong, Yijin Wang, Yun Wang, Jinneng Zeng, Jiaojiao Li, Xiaofeng Li

Proceedings Volume 12565, Conference on Infrared, Millimeter, Terahertz Waves and Applications (IMT2022); 125653J (2023) https://doi.org/10.1117/12.2663127
Event: Conference on Infrared, Millimeter, Terahertz Waves and Applications (IMT2022), 2022, Shanghai, China

Abstract

The innovation of this paper is combining the micro-nano optical technology and the vacuum photoelectric imaging devices manufacturing. The multialkali photocathode deposition substrate is designed with a meta-surface structure by using the Finite-difference time-domain. According to the nanoimprinting and the atomic layer deposition, the structure of meta-surface can be obtained. Metasurface have the ability of simultaneously controlling the phase of the light by tailoring the geometry of microstructures. The negative loss in the direction of light wave propagation is suppressed, the reflection at the interface between the cathode and the deposited substrate is reduced, and the absorption coefficient of the cathode material to the incoming light is improved. And the absorption rate of the incident light can be increased by 20.5%. The atomic layer deposition is used to prepare the nanolaminate on the surface of the micro-structure. Based on the imaging tube with the meta-surface, the experiment results show that the average value of the quantum efficiency increased by 21.2% in the visible light range and increased by 10.3% in near infrared band respectively, which reaching the international advanced level. A new method is provided to improve the performance parameters of the vacuum photoelectric imaging devices and point the direction for the improvement of the imaging tube. As shown in this paper, the performance parameters of the vacuum photoelectric imaging devices still have great development potential by optimizing the structure of the meta-surface.

Citation Download Citation

Heng Zhao, Yaobin Li, Qian Guo, Yanni Gong, Yijin Wang, Yun Wang, Jinneng Zeng, Jiaojiao Li, and Xiaofeng Li "Influence of metasurface on the performance of vacuum photoelectric devices", Proc. SPIE 12565, Conference on Infrared, Millimeter, Terahertz Waves and Applications (IMT2022), 125653J (12 April 2023); https://doi.org/10.1117/12.2663127

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KEYWORDS

Quantum efficiency

Diffraction

Photons

Reflectivity

Absorption

Absorbance

Atomic layer deposition

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