SiN strip waveguide design for sensing applications

Alaa Sultan; Raghi S. El Shamy; Mohamed A. Swillam

doi:10.1117/12.2669991

31 May 2023 SiN strip waveguide design for sensing applications

Alaa Sultan, Raghi S. El Shamy, Mohamed A. Swillam

Proceedings Volume 12572, Optical Sensors 2023; 125720T (2023) https://doi.org/10.1117/12.2669991
Event: SPIE Optics + Optoelectronics, 2023, Prague, Czech Republic

Abstract

In this work, a highly sensitive sensor made of SiN is proposed that can be used in gas or biological sensing, where the choice depends on whether a marker is used or not. The whole sensor is subjected to water cladding. The proposed device is based on a Mach-Zehnder Interferometer (MZI), while the sensing arm is used for sensing the change in the refractive index of the analyte. Both polarizations (TE, TM) are considered in this study, where a higher sensitivity is achieved for the TE-polarized light. The field confinement in the strip waveguide in the sensing region is investigated and verified with a mode solver, whereas the optimum dimensions are obtained using finite difference eigenmode and finite difference time domain solvers. With a sensing arm length of only 180 μm, the proposed sensor achieves a device sensitivity of about 1942 nm/RIU and a figure-of-merit (FOM) as high as 2284 RIU −1 at the wavelength of 1.55 μm. Higher values of FOM can even be attained by employing a longer sensing arm.

Conference Presentation

Citation Download Citation

Alaa Sultan, Raghi S. El Shamy, and Mohamed A. Swillam "SiN strip waveguide design for sensing applications", Proc. SPIE 12572, Optical Sensors 2023, 125720T (31 May 2023); https://doi.org/10.1117/12.2669991

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available