Electrical measurements of overlay using the Prometrix Lithomap LM20

David Martin

doi:10.1117/12.20081

1 June 1990 Electrical measurements of overlay using the Prometrix Lithomap LM20

David Martin

Proceedings Volume 1261, Integrated Circuit Metrology, Inspection, and Process Control IV; (1990) https://doi.org/10.1117/12.20081
Event: Microlithography '90, 1990, San Jose, CA, United States

Abstract

New test structures for the electrical measurement of overlay using the Prometrix Lithomap LM2O have been designed. These have been extensively used to assess the performance of Canon FPA 1550 step-and--repeat alignment instruments. Results indicate that 98 % of the measured sites are within alignment tolerance of +1- 0.4 microns.

Citation Download Citation

David Martin "Electrical measurements of overlay using the Prometrix Lithomap LM20", Proc. SPIE 1261, Integrated Circuit Metrology, Inspection, and Process Control IV, (1 June 1990); https://doi.org/10.1117/12.20081

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