Author Affiliations +
Tamar Cromwijk,1,2 Manashee Adhikary,1,2 Sander Konijnenberg,3 Wim Coene,3 Teus Tukker,3 Johannes de Boer,1 Stefan Witte,1,2 Arie den Boef3
1Vrije Univ. (Netherlands)
2Advanced Research Ctr. for Nanolithography (Netherlands)
3ASML Netherlands B.V. (Netherlands)