Development of a liquid interferometric optical microscope (L-IOM) in phase-shift mode with standard Mirau objectives

Marc Jobin

doi:10.1117/12.2674143

15 August 2023 Development of a liquid interferometric optical microscope (L-IOM) in phase-shift mode with standard Mirau objectives

Marc Jobin

Author Affiliations +

Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII; 126182W (2023) https://doi.org/10.1117/12.2674143
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

We have developed an interferometric optical microscope (IOM) in phase shift mode (PSM) compatible with standard liquid cells and which uses non-immersive, standard and commercially available Mirau objectives. A 15mW He-Ne laser is used for the illumination and the induced speckle pattern in canceled with a rotating diffusing glass. The interferograms displaying the interference fringes are shown in air and in water for various illumination conditions. We show a detailed comparison of the topography obtained in air and in water in HOPG with our liquid IOM (L-IOM). The noise level is very similar in air and in water and is below 1nm.

Citation Download Citation

Marc Jobin "Development of a liquid interferometric optical microscope (L-IOM) in phase-shift mode with standard Mirau objectives", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 126182W (15 August 2023); https://doi.org/10.1117/12.2674143

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available