The demand on the miniaturization of products has fostered the advancement of high-resolution fabrication technologies. Here, we demonstrate a simple and low-cost UV-LED-based lithography technique for structuring at micro- and nanoscale. The corresponding experimental setup was established with off-the-shelf components and allows for single structuring within seconds based on a standard microscope projection photolithography (MPP) process. Single lines with feature sizes down to 150 nm were successfully produced. In addition, high-resolution gratings, ring resonators as well as arrayed waveguide gratings at the micro- and nanoscale were successfully fabricated as well. This operation-friendly, highly efficient and low-cost approach exhibits great potential in micro- and nanomanufacturing for applications in fields such as nanophotonics, biophotonics and micro- and nanoelectromechanical systems.
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