Design of MEMS gyroscope mounting error calibration platform based on optical traceability

Renpu Li; Juan Yan; Tao Feng; Yujia Huo; Lei Liu

doi:10.1117/12.2691206

1 August 2023 Design of MEMS gyroscope mounting error calibration platform based on optical traceability

Renpu Li, Juan Yan, Tao Feng, Yujia Huo, Lei Liu

Proceedings Volume 12752, Second International Conference on Optoelectronic Information and Computer Engineering (OICE 2023); 1275206 (2023) https://doi.org/10.1117/12.2691206
Event: Second International Conference on Optoelectronic Information and Computer Engineering (OICE 2023), 2023, Hangzhou, China

Abstract

A microelectromechanical system (MEMS) gyroscope mounting error calibration platform composed of autocollimator and manual turntable were proposed. In order to achieve the dynamic angular range reflected in the mounting error of MEMS gyroscope, the range of the NIKON-6D autocollimator has been extended from ±15' to ±9°by exploiting the relationship between the angular range and the structure of the reflector. In addition, in the software design, a common data acquisition serial port between CMOS camera and MEMS gyroscope was built. By integrating the angular rate measurements of the MEMS gyroscope with the sampling time, a uniformity of magnitude was obtained between the angular readings of the autocollimator and the angular rate readings of the MEMS gyroscope. Experimental verification shows that compared with precision three-axis angular rate output turntable, the relative calibration deviation of the MEMS gyroscope mounting error coefficient is less than 0.6%, and the platform benefits from the traceable reference of the autocollimator, which has the advantages of low maintenance evaluation rate and high stability, and can serve the long-cycle and high-efficiency MEMS gyroscope mounting error calibration and calibration process.

Citation Download Citation

Renpu Li, Juan Yan, Tao Feng, Yujia Huo, and Lei Liu "Design of MEMS gyroscope mounting error calibration platform based on optical traceability", Proc. SPIE 12752, Second International Conference on Optoelectronic Information and Computer Engineering (OICE 2023), 1275206 (1 August 2023); https://doi.org/10.1117/12.2691206

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KEYWORDS

Gyroscopes

Microelectromechanical systems

Calibration

Autocollimators

Conical mirrors

Reflection

Design and modelling

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