Application of vector phase retrieval model in high numerical aperture optical systems

Yuejia Li; Huiwen Liu; Yingzhe Yang; Jian Bai

doi:10.1117/12.2688663

28 November 2023 Application of vector phase retrieval model in high numerical aperture optical systems

Yuejia Li, Huiwen Liu, Yingzhe Yang, Jian Bai

Proceedings Volume 12765, Optical Design and Testing XIII; 127651W (2023) https://doi.org/10.1117/12.2688663
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Conference Poster

Abstract

Phase retrieval (PR) technology can reconstruct the complex amplitude information of the entrance pupil surface from the captured defocus intensity images, and has been successfully applied in many scientific fields such as astronomical observation, biomedical imaging and digital signal restoration. For low numerical aperture (NA) optical systems, the point spread function (PSF) can be calculated using the Fresnel diffraction propagation theory based on Fourier transform, ignoring the polarization field of the light field. However, for high-NA systems, the focal spot not only includes the transverse component, but also the longitudinal component accounts for a proportion that cannot be ignored, thus necessitating a vector model when calculating the PSF in the non-paraxial region. In this paper, the vector diffraction calculation model with arbitrary defocus distance based on the extended Nijboer-Zernike (ENZ) theory is established, which can characterize the light field components in three directions under the Cartesian coordinate system. What’s more, a modified Gauss-Newton theory is innovatively applied to the axial phase difference PR model. Compared with the traditional first-order algorithm, the second-order algorithm can reduce the number of iterations. In addition, so as to verify the effectiveness of the proposed method, numerical simulations matching the physical model are carried out, the results show that the proposed method can accurately reconstruction the wavefront with high robustness. In conclusion, the established vector PR model in this paper would provide a creatively guidance for wavefront measurement of high-NA optical systems that is significant in the fields of semiconductor lithography, micro imaging and micro manipulation.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yuejia Li, Huiwen Liu, Yingzhe Yang, and Jian Bai "Application of vector phase retrieval model in high numerical aperture optical systems", Proc. SPIE 12765, Optical Design and Testing XIII, 127651W (28 November 2023); https://doi.org/10.1117/12.2688663

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