Portable confocal-controlled LIBS microscopy based on MEMS mirror scanning

Xu Wang; Bo Peng; Han Cui; Yun Wang; Weiqian Zhao; Hongyan Deng; Lirong Qiu

doi:10.1117/12.2686945

29 November 2023 Portable confocal-controlled LIBS microscopy based on MEMS mirror scanning

Xu Wang, Bo Peng, Han Cui, Yun Wang, Weiqian Zhao, Hongyan Deng, Lirong Qiu

Proceedings Volume 12767, Optoelectronic Imaging and Multimedia Technology X; 1276713 (2023) https://doi.org/10.1117/12.2686945
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Conference Poster

Abstract

In this paper, we propose a novel portable confocal-controlled LIBS microscopy method with highly integrated structure. A 2D MEMS mirror scanning mirror was utilized to achieve beam transverse scanning and compact imaging structure design. Confocal-controlled LIBS was utilized to increase the focusing abilities and reduced the size of the laser ablation, thereby achieving a better spatial resolution imaging. Thereafter, 3D elemental mapping was constructed from the morphological and LIBS spectral data of the sample. The system had a lateral resolution of geometrical and elemental maps of up 800 nm and 15 μm, which is basically consistent with the theoretical analysis.

Citation Download Citation

Xu Wang, Bo Peng, Han Cui, Yun Wang, Weiqian Zhao, Hongyan Deng, and Lirong Qiu "Portable confocal-controlled LIBS microscopy based on MEMS mirror scanning", Proc. SPIE 12767, Optoelectronic Imaging and Multimedia Technology X, 1276713 (29 November 2023); https://doi.org/10.1117/12.2686945

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