Research on the method of determining the number of layers and mapping of two-dimensional materials based on high-precision confocal Raman spectroscopy

Angze Li; Xiaojuan Chuai; Han Cui; Lirong Qiu; Weiqian Zhao

doi:10.1117/12.2686946

29 November 2023 Research on the method of determining the number of layers and mapping of two-dimensional materials based on high-precision confocal Raman spectroscopy

Angze Li, Xiaojuan Chuai, Han Cui, Lirong Qiu, Weiqian Zhao

Author Affiliations +

Proceedings Volume 12767, Optoelectronic Imaging and Multimedia Technology X; 1276714 (2023) https://doi.org/10.1117/12.2686946
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Conference Poster

Abstract

This article proposes a two-dimensional material layer determination and mapping method based on high-precision confocal Raman spectroscopy. It achieves nanometer-level axial focusing accuracy, and the lateral resolution of Raman spectroscopy is better than 600 nm. Compared with non-confocal Raman systems, laser confocal Raman systems can accurately determine the number of layers of molybdenum disulfide materials within 10 layers, significantly improving the accuracy of layer determination and spectral imaging stability of existing Raman imaging techniques for two-dimensional materials. This method provides a scientific basis for the design and performance optimization of semiconductor devices.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Angze Li, Xiaojuan Chuai, Han Cui, Lirong Qiu, and Weiqian Zhao "Research on the method of determining the number of layers and mapping of two-dimensional materials based on high-precision confocal Raman spectroscopy", Proc. SPIE 12767, Optoelectronic Imaging and Multimedia Technology X, 1276714 (29 November 2023); https://doi.org/10.1117/12.2686946

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