Terahertz sensing of sub-nm dielectric film via electron tunnelling

Matej Sebek; Tobias Olaf Buchmann; Peter Uhd Jepsen; Simon Jappe Lange

doi:10.1117/12.2687537

26 November 2023 Terahertz sensing of sub-nm dielectric film via electron tunnelling

Matej Sebek, Tobias Olaf Buchmann, Peter Uhd Jepsen, Simon Jappe Lange

Proceedings Volume 12776, Infrared, Millimeter-Wave, and Terahertz Technologies X; 1277612 (2023) https://doi.org/10.1117/12.2687537
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Conference Poster

Abstract

Terahertz (THz) sensing of ultrathin layers has been a longstanding challenge due to limitations in conventional detection techniques. In this study, we present a novel approach for sensing sub-1 nm thin dielectric layers based on Fowler-Nordheim (FN) tunneling. Our method exploits the FN tunneling effect at a metal-dielectric interface, enabling sensitive detection of changes in dielectric layer thickness within the THz frequency range. To validate our FN tunneling-based THz sensing technique, we carried out a comprehensive analysis of experimental and simulated data. Our findings demonstrate that this approach exhibits exceptional sensitivity, capable of detecting dielectric layers with thicknesses down to the sub-nanometer scale. Such sensitivity has significant implications for various applications, including nanoscale dielectric characterization, advanced material development, and quality control in microelectronics manufacturing. The FN tunneling-based THz sensing methodology not only overcomes the limitations of traditional detection techniques but also paves the way for novel ultrathin layer sensing capabilities in the rapidly advancing field of terahertz technology. Our study showcases the potential of this groundbreaking technique to revolutionize the THz sensing landscape, offering new opportunities for research and development in various fields.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Matej Sebek, Tobias Olaf Buchmann, Peter Uhd Jepsen, and Simon Jappe Lange "Terahertz sensing of sub-nm dielectric film via electron tunnelling", Proc. SPIE 12776, Infrared, Millimeter-Wave, and Terahertz Technologies X, 1277612 (26 November 2023); https://doi.org/10.1117/12.2687537

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available