Single step repair of clear and opaque mask defects

Zbigniew Drozdowicz; Joel Bornstein; John O'Connor

doi:10.1117/12.3011887

12 October 2023 Single step repair of clear and opaque mask defects

Zbigniew Drozdowicz, Joel Bornstein, John O'Connor

Proceedings Volume 12809, Bay Area Chrome Users Society Symposium 1985; 1280904 (2023) https://doi.org/10.1117/12.3011887
Event: 5th Annual BACUS Symposium, 1985, Sunnyvale, CA, United States

Abstract

The DRS II System was developed in response to continuous pressure from the semiconductor industry for an improved clear repair system for photomasks. We looked at a number of alternatives to the multi-step liftoff process before deciding on the laser-initiated decomposition of organometallic gases. The desire was to retain the technology of excess chrome removal using a laser zapper, proven in years of use at most mask makers and user installations, with an equally reliable method of missing chrome replacement.

Citation Download Citation

Zbigniew Drozdowicz, Joel Bornstein, and John O'Connor "Single step repair of clear and opaque mask defects", Proc. SPIE 12809, Bay Area Chrome Users Society Symposium 1985, 1280904 (12 October 2023); https://doi.org/10.1117/12.3011887

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