Stroboscopic sampling moiré microscope (SSMM) for investigation of QTF’s mechanical properties

Mona Yadi; Tsutomu Uenohara; Yasuhiro Mizutani; Yoshiharu Morimoto; Yasuhiro Takaya

doi:10.1117/12.3002171

13 March 2024 Stroboscopic sampling moiré microscope (SSMM) for investigation of QTF’s mechanical properties

Mona Yadi, Tsutomu Uenohara, Yasuhiro Mizutani, Yoshiharu Morimoto, Yasuhiro Takaya

Proceedings Volume 12858, Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications XXI; 1285803 (2024) https://doi.org/10.1117/12.3002171
Event: SPIE BiOS, 2024, San Francisco, California, United States

Abstract

Understanding and accurately analyzing the mechanical properties of microelectromechanical systems (MEMS) is essential for assessing their device functionality and performance. Precisely measuring the dynamic properties of a quartz tuning fork (QTF), for instance, can significantly enhance the imaging resolution of QTF-based scanning probe microscopy systems. Current methods, such as analytical and numerical approaches, have limitations when it comes to providing accurate measurements. To overcome these limitations, we proposed an experimental approach that combines stroboscopic and sampling Moiré (SM) techniques. Our method focuses on investigating the in-plane vibration behavior of a QTF and utilizes the obtained results to measure its mechanical parameters. To achieve this, we synchronize nanometer-scale light pulses, generated using a custom-designed stroboscope, with the QTF’s excitation voltage, effectively freezing the vibrations. These vibrations are then observed using a standard CCD camera. Subsequently, SM analysis is employed to extract the surface vibration profile, facilitating the measurement of dynamic properties. This technique has the potential to analyze various micro-devices that are compatible with the sample preparation process.

Conference Presentation

Citation Download Citation

Mona Yadi, Tsutomu Uenohara, Yasuhiro Mizutani, Yoshiharu Morimoto, and Yasuhiro Takaya "Stroboscopic sampling moiré microscope (SSMM) for investigation of QTF’s mechanical properties", Proc. SPIE 12858, Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications XXI, 1285803 (13 March 2024); https://doi.org/10.1117/12.3002171

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