Ultralow loss chalcogenide waveguide platform for mid-IR on-chip spectrometer

Vasileios Mourgelas; Sirawit Boonsit; James S. Wilkinson; Ganapathy Senthil Murugan

doi:10.1117/12.3001161

12 March 2024 Ultralow loss chalcogenide waveguide platform for mid-IR on-chip spectrometer

Vasileios Mourgelas, Sirawit Boonsit, James S. Wilkinson, Ganapathy Senthil Murugan

Proceedings Volume 12889, Integrated Optics: Devices, Materials, and Technologies XXVIII; 128890H (2024) https://doi.org/10.1117/12.3001161
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

A chalcogenide waveguide platform with the combination of GeAsSeTe (IG3)/GeAsSe (IG2) on wet-/dry-etched silicon pedestals is reported. Chalcogenide glasses offer high index contrast and compact footprints, while the post-processing challenges are addressed using Si pedestals. The integration of IG2/IG3 chalcogenides on Si demonstrates ultralow loss of 0.08 ± 0.02 dB/cm at a wavelength of 10 μm. We have measured a thermo-optic coefficient of 1.1x10^-4 K^-1, which is comparable to Si and GaAs. The combination of simplified fabrication, minimal propagation losses and a strong thermooptic coefficient, positions this waveguide platform as a promising candidate for on-chip tunable long-wave IR spectrometers for practical applications in biomedical diagnostics and environmental sensing.

Conference Presentation

Citation Download Citation

Vasileios Mourgelas, Sirawit Boonsit, James S. Wilkinson, and Ganapathy Senthil Murugan "Ultralow loss chalcogenide waveguide platform for mid-IR on-chip spectrometer", Proc. SPIE 12889, Integrated Optics: Devices, Materials, and Technologies XXVIII, 128890H (12 March 2024); https://doi.org/10.1117/12.3001161

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