X-photon 3D nanolithography

Antanas Butkus; Dimitra Ladika; Edvinas Skliutas; Vasileia Melissinaki; Maria Farsari; Saulius Juodkazis; Mangirdas Malinauskas

doi:10.1117/12.3000295

13 March 2024 X-photon 3D nanolithography

Antanas Butkus, Dimitra Ladika, Edvinas Skliutas, Vasileia Melissinaki, Maria Farsari, Saulius Juodkazis, Mangirdas Malinauskas

Author Affiliations +

Proceedings Volume 12898, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII; 1289805 (2024) https://doi.org/10.1117/12.3000295
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

We report on wavelength independent laser direct writing 3D nanolithography using both amplified and non-amplified laser sources. Ultra-precise and truly three-dimensional optical printing technique known as two-photon or multi-photon polymerization (TPP and MPP, respectively) is experimentally validated without the use of any photo-initiators and applying various wavelengths ranging from 515 to 1250 nm. The novel approach is achieved in hybrid organic-inorganic SZ2080^TM and other hybrid polymer materials showing its versatility. Linear writing speeds up to 100 mm/s are realized without compromising the spatial resolution or quality of the structures reaching reproducible line structures with ≈270 nm in lateral dimensions. Therefore, here we demonstrate that various light-matter interactions mechanisms can trigger photopolymerization enabling optical 3D nanoscale printing using x-photon absorption.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Antanas Butkus, Dimitra Ladika, Edvinas Skliutas, Vasileia Melissinaki, Maria Farsari, Saulius Juodkazis, and Mangirdas Malinauskas "X-photon 3D nanolithography", Proc. SPIE 12898, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII, 1289805 (13 March 2024); https://doi.org/10.1117/12.3000295

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available