A water-immersible scanning mirror with hybrid polymer and elastomer hinges for high-speed and wide-field 3D ultrasound imaging

Shuangliang Li; Zhijie Dong; Pengfei Song; Jun Zou

doi:10.1117/12.3000640

12 March 2024 A water-immersible scanning mirror with hybrid polymer and elastomer hinges for high-speed and wide-field 3D ultrasound imaging

Shuangliang Li, Zhijie Dong, Pengfei Song, Jun Zou

Author Affiliations +

Proceedings Volume 12899, MOEMS and Miniaturized Systems XXIII; 128990B (2024) https://doi.org/10.1117/12.3000640
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

This paper reports a new water-immersible single-axis scanning mirror using hybrid polymer and elastomer hinges to achieve both high scanning resonance frequencies and large tilting angles for high-speed and wide-field 3D ultrasound imaging. To demonstrate the concept, a prototype scanning mirror is designed, fabricated, and characterized. The fast- and slow-scanning were achieved by integrating stiff BoPET (biaxially oriented polyethylene terephthalate) and soft elastomer PDMS (Polydimethylsiloxane) hinges, respectively. The testing results have shown a resonance frequency of 270 Hz for the BoPET hinges and a resonance frequency of 10 Hz for the PDMS hinges when the scanning mirror was immersed in water. 3D ultrasound imaging is demonstrated by combining the fast- and slow-scanning together to provide both an augmented field of view (FoV) and high local imaging volume rate.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Shuangliang Li, Zhijie Dong, Pengfei Song, and Jun Zou "A water-immersible scanning mirror with hybrid polymer and elastomer hinges for high-speed and wide-field 3D ultrasound imaging", Proc. SPIE 12899, MOEMS and Miniaturized Systems XXIII, 128990B (12 March 2024); https://doi.org/10.1117/12.3000640

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