Paper
1 October 1990 Barrier layers for high-temperature superconductors on elemental and compound semiconductors
Paul H. Holloway, J. Kelly Truman, Carl H. Mueller
Author Affiliations +
Abstract
Thin films of Y-Ba-Cu-O have been deposited on barrier layers of SrTiO3 and ZrO2 by laser ablation or RF planar magnetron sputter deposition. The barrier layers are required to prevent interactions of the deposited superconducator with the underlying semiconductor and at the same time enhance the texture in the superconductor to increase the critical current density. The ability of various processing steps to enhance these properties and simultaneously allow scale-up to coat larger areas successfully are discussed.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul H. Holloway, J. Kelly Truman, and Carl H. Mueller "Barrier layers for high-temperature superconductors on elemental and compound semiconductors", Proc. SPIE 1292, Superconductivity Applications for Infrared and Microwave Devices, (1 October 1990); https://doi.org/10.1117/12.21025
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KEYWORDS
Superconductors

Thin films

Sputter deposition

Laser ablation

Barium

Silicon

Compound semiconductors

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