Three-dimensional displacement sensing with a nanoparticle on waveguide film structure

Wenhuang Zhang; Aiping Yang; Luping Du

doi:10.1117/12.3006825

24 November 2023 Three-dimensional displacement sensing with a nanoparticle on waveguide film structure

Wenhuang Zhang, Aiping Yang, Luping Du

Proceedings Volume 12935, Fourteenth International Conference on Information Optics and Photonics (CIOP 2023); 129351S (2023) https://doi.org/10.1117/12.3006825
Event: Fourteenth International Conference on Information Optics and Photonics (CIOP 2023), 2023, Xi’an, China

Abstract

Three-Dimensional Displacement Sensing has a very important demand in research fields such as nanomanufacturing, lithography, and microscopic imaging. Optical displacement sensing has received considerable attention in recent years due to the advantages of non-contact and high-precision, etc. However, traditional methods that use optical phase or polarization singularities to obtain position information are affected by the intensity of light, making the detection difficult. Here, we propose a nanoparticle on waveguide film structure that utilizes the nanoparticle as a near-field probe to achieve three-dimensional displacement sensing. The scattering light of the nanoparticle excites the resonance modes of the waveguide structure and projects the generated signal to the far field. The far-field distribution has a strong angular correlation, and by detecting the relative strength of the corresponding angle in the far-field distribution, it is possible to achieve three-dimensional displacement sensing. We have theoretically verified this idea through the finite difference time domain (FDTD) method. The three-dimensional displacement sensor implemented by this structure may be applied in nanometrology, nanofabrication, and super-resolution microscopes.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Wenhuang Zhang, Aiping Yang, and Luping Du "Three-dimensional displacement sensing with a nanoparticle on waveguide film structure", Proc. SPIE 12935, Fourteenth International Conference on Information Optics and Photonics (CIOP 2023), 129351S (24 November 2023); https://doi.org/10.1117/12.3006825

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KEYWORDS

Waveguides

Sensors

Nanoparticles

Particles

Silicon

Finite-difference time-domain method

Near field optics

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