A high efficiency metrology for asymmetric grating structure based on scalar diffraction theory and intelligence optimization

Yunyi Chen; Nan Lin

doi:10.1117/12.3007646

24 November 2023 A high efficiency metrology for asymmetric grating structure based on scalar diffraction theory and intelligence optimization

Yunyi Chen, Nan Lin

Author Affiliations +

Proceedings Volume 12935, Fourteenth International Conference on Information Optics and Photonics (CIOP 2023); 129352I (2023) https://doi.org/10.1117/12.3007646
Event: Fourteenth International Conference on Information Optics and Photonics (CIOP 2023), 2023, Xi’an, China

Abstract

Gratings, as important optical elements, are widely applied in the field of optical metrology as well as spectral purity. With the gradual decrease in the measuring wavelength to ensure high sensitivity, the scalar diffraction model has once again gained attention as a fast method for obtaining diffraction results and analyzing physical processes. This paper provides a detailed deduction of the reflected diffraction efficiency of an asymmetric trapezoid grating using the scalar diffraction theory, and demonstrates its validity and accuracy by comparing it with the vector diffraction theory. Building upon the scalar model, we further developed a rapid reconstruction model to determine the grating structure using an intelligence optimization method, namely an improved particle swarm optimization algorithm with random perturbation. The method eliminates the need for creating a large dataset for model training, while still providing a relatively accurate measurement result. It can be seen as a step towards narrowing the search range of feasible solutions, which significantly improves the efficiency of metrology.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yunyi Chen and Nan Lin "A high efficiency metrology for asymmetric grating structure based on scalar diffraction theory and intelligence optimization", Proc. SPIE 12935, Fourteenth International Conference on Information Optics and Photonics (CIOP 2023), 129352I (24 November 2023); https://doi.org/10.1117/12.3007646

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KEYWORDS

Diffraction gratings

Diffraction

Optical gratings

Reflection

Metrology

Particle swarm optimization

Reconstruction algorithms

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