Design of MZI electro-optic modulator on lithium niobate heterogeneous integration platforms

Zhuoyun Li; Yang Chen; Qing Wang; Mingbin Yu; Shuxiao Wang; Yan Cai

doi:10.1117/12.3007772

21 December 2023 Design of MZI electro-optic modulator on lithium niobate heterogeneous integration platforms

Zhuoyun Li, Yang Chen, Qing Wang, Mingbin Yu, Shuxiao Wang, Yan Cai

Proceedings Volume 12966, AOPC 2023: AI in Optics and Photonics ; 129661U (2023) https://doi.org/10.1117/12.3007772
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China

Abstract

Applying various functional materials to silicon to enhance the functionality of silicon photonics is a potential solution for silicon photonics platform under the requirement of CMOS compatibility. In this paper, two LN heterogeneous integration platforms have been proposed. One is the integration of LN film with a 220 nm top silicon SOI platform, in which the simulated results demonstrate that the designed modulator has a low half wave-voltage length product of 2.27 V·cm. And the other is the integration of LN film with a 400 nm top silicon nitride on insulator platform, in which the the proposed device achieves a VpiL of 2.58 V·cm and a 3-dB bandwidth of ~130 GHz with 7-mm long modulation region is verified by simulation.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Zhuoyun Li, Yang Chen, Qing Wang, Mingbin Yu, Shuxiao Wang, and Yan Cai "Design of MZI electro-optic modulator on lithium niobate heterogeneous integration platforms", Proc. SPIE 12966, AOPC 2023: AI in Optics and Photonics , 129661U (21 December 2023); https://doi.org/10.1117/12.3007772

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