A tunable extrinsic Fabry-Pérot interferometer membrane for sensitivity enhancement

Jialin Wen; Tianyu Yang; Zeyu Zheng; Linfeng Lan; Weifeng Deng; Bing Yang; Chunlei Yang; Yuming Dong

doi:10.1117/12.3006988

18 December 2023 A tunable extrinsic Fabry-Pérot interferometer membrane for sensitivity enhancement

Jialin Wen, Tianyu Yang, Zeyu Zheng, Linfeng Lan, Weifeng Deng, Bing Yang, Chunlei Yang, Yuming Dong

Proceedings Volume 12968, AOPC 2023: Optic Fiber Gyro ; 1296815 (2023) https://doi.org/10.1117/12.3006988
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China

Abstract

In this work, a novel tunable diaphragm structures are designed as sensing diaphragms for ultrasonic sensors. The natural frequency and sensitivity of the new structure diaphragms is simulated by finite element method. The proposed membrane structures is outer-ring clover (ORC) structure. Typically, an increase in membrane sensitivity is accompanied by a decrease in its natural frequency. However, this can be significantly mitigated by the proposed structures, which can exhibit notable structural optimization effects by simultaneously enhancing sensitivity and minimizing the reduction of the natural frequency. The simulation results indicate that, when the outer diameter and thickness remain unchanged, the sensor can achieve a maximum sensitivity improvement of 3.5 times and a reduction of 1.25 times in the natural frequency compared to the circular diaphragms (CD). Furthermore, ORC can be fabricated by micro-electromechanical systems (MEMS) technology, making it feasible for practical manufacturing and production. The sensing membrane is expected to be applicable in detection fields such as ultrasound partial discharge and underwater acoustics.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jialin Wen, Tianyu Yang, Zeyu Zheng, Linfeng Lan, Weifeng Deng, Bing Yang, Chunlei Yang, and Yuming Dong "A tunable extrinsic Fabry-Pérot interferometer membrane for sensitivity enhancement", Proc. SPIE 12968, AOPC 2023: Optic Fiber Gyro , 1296815 (18 December 2023); https://doi.org/10.1117/12.3006988

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