Universal Fourier optics model for virtual confocal microscopes

Felix Rosenthal; Tobias Pahl; Tim Eckhardt; Sebastian Hagemeier; Jonas Compagnone; Tim Czasch; Michael Diehl; Richard Koops; Peter Lehmann

doi:10.1117/12.3017579

18 June 2024 Universal Fourier optics model for virtual confocal microscopes

Felix Rosenthal, Tobias Pahl, Tim Eckhardt, Sebastian Hagemeier, Jonas Compagnone, Tim Czasch, Michael Diehl, Richard Koops, Peter Lehmann

Author Affiliations +

Proceedings Volume 12997, Optics and Photonics for Advanced Dimensional Metrology III; 129970N (2024) https://doi.org/10.1117/12.3017579
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

Three-dimensional transfer functions generally provide a comprehensive description of the transfer behavior of optical topography measuring instruments in spatial frequency domain. Recently, an analytical derivation of the transfer function has been achieved and based on this, the so-called universal Fourier optics (UFO) model has been developed for virtual coherence scanning interferometry (CSI). Especially for 3D surface topographies, simulation models suffer from long simulation times, even if the scattering process is considered approximately. The UFO model reduces the simulation time to a number of 2D FFTs (Fast Fourier Transforms) of a phase object enabling modeling of realistic 3D topographies in reasonable time for the first time. Besides CSI, also confocal microscopy (CM) is a widely used optical profiling technique and hence, this study presents a UFO model for CM considering lateral as well as depth scanning. The opportunities provided by modeling are demonstrated simulating confocal image stacks for realistic 3D surface topographies.

Citation Download Citation

Felix Rosenthal, Tobias Pahl, Tim Eckhardt, Sebastian Hagemeier, Jonas Compagnone, Tim Czasch, Michael Diehl, Richard Koops, and Peter Lehmann "Universal Fourier optics model for virtual confocal microscopes", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 129970N (18 June 2024); https://doi.org/10.1117/12.3017579

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