Inline inspection of coating thickness on polymers using infrared reflection-absorption spectroscopy

F. Münch; L. Eschbach; I. Breunig; J. Geng; D. Carl; B. Hauer

doi:10.1117/12.3016437

18 June 2024 Inline inspection of coating thickness on polymers using infrared reflection-absorption spectroscopy

F. Münch, L. Eschbach, I. Breunig, J. Geng, D. Carl, B. Hauer

Proceedings Volume 12997, Optics and Photonics for Advanced Dimensional Metrology III; 129970Q (2024) https://doi.org/10.1117/12.3016437
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

Oxide-coated polymers hold promise as packaging materials that allow closed-loop recycling. In this context, accurate quality control of the coating thickness during the production process is essential. State-of-the-art measurement systems lack the compactness and scalability required for widespread applications inside production equipment. With an adapted spectral measuring range achieved through the implementation of optical filters, we apply infrared reflection-absorption spectroscopy (IRRAS) for inline quality control of nanometer-thin oxide coatings on polymers. For the commonly used SiO_x coatings with a thickness of 5 to about 200 nm, our sensor principle enables thickness measurements with a precision of better than 5 nm in two seconds. We show data from an industrial plasma coating system equipped with an array of sensors to measure the SiO_xcoating thickness on parallelly processed cups during production. The results obtained from the simultaneous measurements of the coated cups effectively demonstrate the inline capability of our sensor.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

F. Münch, L. Eschbach, I. Breunig, J. Geng, D. Carl, and B. Hauer "Inline inspection of coating thickness on polymers using infrared reflection-absorption spectroscopy", Proc. SPIE 12997, Optics and Photonics for Advanced Dimensional Metrology III, 129970Q (18 June 2024); https://doi.org/10.1117/12.3016437

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