Optical testing of a high numerical aperture spherical mirror

Hagyong Kihm; Ma. Angela Lourdes B. Lequiron; Jae-Hyuck Choi; Ho-Soon Yang

doi:10.1117/12.3022971

17 June 2024 Optical testing of a high numerical aperture spherical mirror

Hagyong Kihm, Ma. Angela Lourdes B. Lequiron, Jae-Hyuck Choi, Ho-Soon Yang

Author Affiliations +

Proceedings Volume 13021, Optical Fabrication and Testing VIII; 130210D (2024) https://doi.org/10.1117/12.3022971
Event: SPIE Optical Systems Design, 2024, Strasbourg, France

Abstract

Measurement and fabrication process for a reference concave mirror with NA 0.9 is explained. The mirror's surface figure error is measured by using a Fizeau interferometer and a computer-generated hologram (CGH). The result is compared with a stitched figure error using a small NA transmission sphere. Also, the system error is calibrated by a Random Ball Test (RBT). Ion beam figuring (IBF) is employed to enhance the surface figure of the reference mirror. Achieving a high NA of 0.9 opens new opportunities in advanced metrology and optics applications.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Hagyong Kihm, Ma. Angela Lourdes B. Lequiron, Jae-Hyuck Choi, and Ho-Soon Yang "Optical testing of a high numerical aperture spherical mirror", Proc. SPIE 13021, Optical Fabrication and Testing VIII, 130210D (17 June 2024); https://doi.org/10.1117/12.3022971

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