Telecentric, flat-field, anastigmatic, four-mirror optical system for lighographic camera

Sung Chan Park; Sang-Soo Lee

doi:10.1117/12.34892

1 July 1990 Telecentric, flat-field, anastigmatic, four-mirror optical system for lighographic camera

Sung Chan Park, Sang-Soo Lee

Proceedings Volume 1319, Optics in Complex Systems; (1990) https://doi.org/10.1117/12.34892
Event: 15th International Optics in Complex Systems, 1990, Garmisch, Germany

Abstract

A telecentric flat field and anastigmatic four mirror optical camera system is developed for lithographic application. We have Obtained initially the analytic solutions of the four spherical mirror system free from four Seidel aberrations with reduction magnification (5x). However the systems obtained after corrections have still sizable amount of residual aberrations and small field. To overcome these shortcomings aspherization of the three mirrors is performed and it is found that it gives more improved performances.

Citation Download Citation

Sung Chan Park and Sang-Soo Lee "Telecentric, flat-field, anastigmatic, four-mirror optical system for lighographic camera", Proc. SPIE 1319, Optics in Complex Systems, (1 July 1990); https://doi.org/10.1117/12.34892

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