Multichannel chromatic interferometry: metrology applications

Gilbert M. Tribillon; Jose E. Calatroni; Patrick Sandoz

doi:10.1117/12.51115

1 January 1991 Multichannel chromatic interferometry: metrology applications

Gilbert M. Tribillon, Jose E. Calatroni, Patrick Sandoz

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51115
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The modulation of the spectrum of a light beam is consider as a metrological tool. In particular, double spectral modulation of a Super Luminiscent Laser Diode (SLD) is used to analyze surface's profiles. Intensity and frequency modulation allows absolute measurements of the surface without any auxiliary phase shifting. Depth and lateral resolution is determined by the spectral resolution of the involved spectroscopic devices.

Citation Download Citation

Gilbert M. Tribillon, Jose E. Calatroni, and Patrick Sandoz "Multichannel chromatic interferometry: metrology applications", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51115

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