Multilayer reflectors for the "water window"

Shi Xu; Brian L. Evans

doi:10.1117/12.23184

1 February 1991 Multilayer reflectors for the "water window"

Shi Xu, Brian L. Evans

Proceedings Volume 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography; (1991) https://doi.org/10.1117/12.23184
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Near normal incidence imaging optics for use at wavelengths A in the 'water window' (2.4X4.4nm) utilise the in-phase reflections from a multilayer stack deposited on a figured substrate. The reflectivity of such a multilayer depends upon the number N of contributing interfaces and the amplitude reflectivity r at each interface where r M + ituz is determined by the difference in the real and imaginary parts of the refractive indices of the media defining the interface. Thus r may be predominantly determined by (Class I) or & (Class II) or a combination of both (Class III). The spectral variation of r (2 .3X4 .8nm) has been computed for interfaces formed by a-C and fifty four different elements which are thereby classified as I, II or III. The normal incidence reflectivity R versus A of representative multilayers from each class has been calculated as a function of N and layer thickness ratio 'y and criteria established for the most suitable choice of layer materials for the 'water window' region. In practice the particulate nature of the thin metal film components of the multilayer results in the experimental values of R being much less than the theoretical values.

Citation Download Citation

Shi Xu and Brian L. Evans "Multilayer reflectors for the "water window"", Proc. SPIE 1343, X-Ray/EUV Optics for Astronomy, Microscopy, Polarimetry, and Projection Lithography, (1 February 1991); https://doi.org/10.1117/12.23184

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