Design of reflective relay for soft x-ray lithography

J. Michael Rodgers; Tanya E. Jewell

doi:10.1117/12.47916

1 January 1991 Design of reflective relay for soft x-ray lithography

J. Michael Rodgers, Tanya E. Jewell

Proceedings Volume 1354, 1990 Intl Lens Design Conf; (1991) https://doi.org/10.1117/12.47916
Event: 1990 International Lens Design Conference, 1990, Monterey, CA, United States

Abstract

An all-reflective unobscured flat-field low-distortion telecentric optical design has been developed for non-scanning reduction soft x-ray lithography application. 1. 0

Citation Download Citation

J. Michael Rodgers and Tanya E. Jewell "Design of reflective relay for soft x-ray lithography", Proc. SPIE 1354, 1990 Intl Lens Design Conf, (1 January 1991); https://doi.org/10.1117/12.47916

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