Proton-diffused channel waveguides on Y-cut LiNbO3 using a self-aligned SiO2-cap diffusion method

Yung-Sung Son; Hyung Jae Lee; Sang-Yoon Yi; Sang-Yung Shin

doi:10.1117/12.24951

1 February 1991 Proton-diffused channel waveguides on Y-cut LiNbO₃ using a self-aligned SiO₂-cap diffusion method

Yung-Sung Son, Hyung Jae Lee, Sang-Yoon Yi, Sang-Yung Shin

Proceedings Volume 1374, Integrated Optics and Optoelectronics II; (1991) https://doi.org/10.1117/12.24951
Event: SPIE Microelectronic Interconnect and Integrated Processing Symposium, 1990, San Jose, United States

Abstract

We report on proton-diffused channel waveguides on Y-cut LiNbO3 fabricated by using pure benzoic acid for proton exchange and a self-aligned Si02 cap for diffusion. They do not exhibit surface damage since the rate of initial proton exchange can be lowered due to the proton conserving property of a selfaligned Si02 cap. The electrooptic property of the waveguide is investigated by the cutoff modulation of a channel waveguide. The proton diffusion with a self-aligned Si02 cap is proved to render good Y-cut LiNbO3 channel waveguides.

Citation Download Citation

Yung-Sung Son, Hyung Jae Lee, Sang-Yoon Yi, and Sang-Yung Shin "Proton-diffused channel waveguides on Y-cut LiNbO₃ using a self-aligned SiO₂-cap diffusion method", Proc. SPIE 1374, Integrated Optics and Optoelectronics II, (1 February 1991); https://doi.org/10.1117/12.24951

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