Paper
1 February 1991 Highly conductive amorphous-ferrite formed by excimer laser material processing
Shigeru Kashiwabara, Kazuhiro Watanabe, Ryozo Fujimoto
Author Affiliations +
Proceedings Volume 1397, 8th Intl Symp on Gas Flow and Chemical Lasers; (1991) https://doi.org/10.1117/12.25927
Event: Eighth International Symposium on Gas-Flow and Chemical Lasers, 1990, Madrid, Spain
Abstract
Laser material processing is one of the promising application fields of high power lasers which are being well developed as a sophisticated machining tool as well as conventional E-beam sources. Particularly, the UV photon material processing by excimer lasers have brought us unique and characteristic results on the processing capability to most materials because of high energy quanta of UV photons extending approximately from 190 nm to 350 nm. The high intensity UV photons would ablate and decompose materials largely due to photochemical processes rather than thermal effects
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shigeru Kashiwabara, Kazuhiro Watanabe, and Ryozo Fujimoto "Highly conductive amorphous-ferrite formed by excimer laser material processing", Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); https://doi.org/10.1117/12.25927
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Excimer lasers

Ultraviolet radiation

Laser processing

Plasma

Materials processing

Pulsed laser operation

Scanning electron microscopy

Back to Top