Measurements of gas flow and gas constituent in a wind-tunnel-type excimer laser under high-repetition-rate operations

Koichi Kasuya; Kazuhiko Horioka; N. Hikida; M. Murazi; K. Nakata; Yasumasa Kawakita; Yoichi Miyai; S. Kato; S. Yoshida; S. Ideno

doi:10.1117/12.25995

1 February 1991 Measurements of gas flow and gas constituent in a wind-tunnel-type excimer laser under high-repetition-rate operations

Koichi Kasuya, Kazuhiko Horioka, N. Hikida, M. Murazi, K. Nakata, Yasumasa Kawakita, Yoichi Miyai, S. Kato, S. Yoshida, S. Ideno

Author Affiliations +

Proceedings Volume 1397, 8th Intl Symp on Gas Flow and Chemical Lasers; (1991) https://doi.org/10.1117/12.25995
Event: Eighth International Symposium on Gas-Flow and Chemical Lasers, 1990, Madrid, Spain

Abstract

A low speed wind tunnel type excimer laser apparatus of about 500 liter gas volume was constructed to study the critical issues concerning such kind of high repetition-rate excimer lasers. For the moment, the gas flow speed and the repetition-rate of the KrF laser was up to 50 m/s and 1 kHz, respectively. The gas flow conditions, the gas constituents and the laser output were measured with various methods to clarify the basic processes.

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Koichi Kasuya, Kazuhiko Horioka, N. Hikida, M. Murazi, K. Nakata, Yasumasa Kawakita, Yoichi Miyai, S. Kato, S. Yoshida, and S. Ideno "Measurements of gas flow and gas constituent in a wind-tunnel-type excimer laser under high-repetition-rate operations", Proc. SPIE 1397, 8th Intl Symp on Gas Flow and Chemical Lasers, (1 February 1991); https://doi.org/10.1117/12.25995

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