Parametric studies and characterization measurements of x-ray lithography mask membranes

Gregory M. Wells; Hector T. H. Chen; Roxann L. Engelstad; Shane R. Palmer

doi:10.1117/12.47349

1 August 1991 Parametric studies and characterization measurements of x-ray lithography mask membranes

Gregory M. Wells, Hector T. H. Chen, Roxann L. Engelstad, Shane R. Palmer

Proceedings Volume 1465, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing; (1991) https://doi.org/10.1117/12.47349
Event: Microlithography, 1991, San Jose, CA, United States

Abstract

The techniques used in the experimental characterization of thin membranes are considered for their potential use as mask blanks for x-ray lithography. Among the parameters of interest for this evaluation are the film's stress, fracture strength, uniformity of thickness, absorption in the x-ray and visible spectral regions and the modulus and grain structure of the material. The experimental techniques used for measuring these properties are described. The accuracy and applicability of the assumptions used to derive the formulas that relate the experimental measurements to the parameters of interest are considered. Experimental results for silicon carbide and diamond films are provided. Another characteristic needed for an x-ray mask carrier is radiation stability. The number of x-ray exposures expected to be performed in the lifetime of an x-ray mask on a production line is on the order of 107. The dimensional stability requirements placed on the membranes during this period are discussed. Interferometric techniques that provide sufficient sensitivity for these stability measurements are described. A comparison is made between the different techniques that have been developed in term of the information that each technique provides, the accuracy of the various techniques, and the implementation issues that are involved with each technique.

Citation Download Citation

Gregory M. Wells, Hector T. H. Chen, Roxann L. Engelstad, and Shane R. Palmer "Parametric studies and characterization measurements of x-ray lithography mask membranes", Proc. SPIE 1465, Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing, (1 August 1991); https://doi.org/10.1117/12.47349

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