Far-infrared ellipsometry of converged beam, theory and experiment

A. B. Sushkov

doi:10.1117/12.2297867

1 October 1991 Far-infrared ellipsometry of converged beam, theory and experiment

A. B. Sushkov

Proceedings Volume 1576, 16th International Conference on Infrared and Millimeter Waves; 15764A (1991) https://doi.org/10.1117/12.2297867
Event: 16th International Conference on Infrared and Millimeter Waves, 1991, Lausanne, Switzerland

Abstract

Ellipsometry is a well known technique of measurement of the optical constants of different substances. To determine the optical constants of small samples in FIR someone should focus irradiation on the sample surface by means of lens or mirror to avoid diffraction effects and to use all energy of the beam. So the problem of converged beam ellipsometry arises. This decision is valid in approximation of parabolic equation or Fresnel integral.

Citation Download Citation

A. B. Sushkov "Far-infrared ellipsometry of converged beam, theory and experiment", Proc. SPIE 1576, 16th International Conference on Infrared and Millimeter Waves, 15764A (1 October 1991); https://doi.org/10.1117/12.2297867

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