Indium tin oxide single-mode waveguide modulator

Ray T. Chen; Daniel P. Robinson; Huey T. Lu; Lev S. Sadovnik; Winston Ho

doi:10.1117/12.50906

1 December 1991 Indium tin oxide single-mode waveguide modulator

Ray T. Chen, Daniel P. Robinson, Huey T. Lu, Lev S. Sadovnik, Winston Ho

Proceedings Volume 1583, Integrated Optical Circuits; (1991) https://doi.org/10.1117/12.50906
Event: OE Fiber, 1991, Boston, MA, United States

Abstract

We have successfully demonstrated an In203:Sn semiconductor thin film waveguide. The energy gap of the film can be manipulated from 3.1 eV (0.4 pm) to 3.7 eV (0.335 mm) by changing the ratio of In203 and Sn02. Waveguide propagation losses of 3 dB/cm for transverse magnetic (TM) and 8 dB/cm for transverse electric (TE) guided waves were experimentally confirmed at the wavelength of 632.8 mm. A phase modulator containing an indium tin oxide waveguide, two holographic mirrors, two microprisms, and two ohmic contacts was fabricated. Electro-optic (current injection) and all optical modulations were conducted. A modulation depth of 18% was experimentally confirmed for the current injection device, using 15-volt applied voltage, and a modulation depth of 15% using 250 mW 355 nm UV light as the activation sources. An In203:Sn waveguide device working at the cutoff boundary was made. A modulation depth of 26 dB was measured with an applied voltage of 30 volts. An array of applications, including use in current sensors, ozone UV sensors, attenuated total reflection (ATR) modulators, delay lines for phased array antennae and multi-quantum wells are highly feasible.

Citation Download Citation

Ray T. Chen, Daniel P. Robinson, Huey T. Lu, Lev S. Sadovnik, and Winston Ho "Indium tin oxide single-mode waveguide modulator", Proc. SPIE 1583, Integrated Optical Circuits, (1 December 1991); https://doi.org/10.1117/12.50906

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available