Paper
1 February 1992 Review of several methods for processing vibration data
Hal Amick, Sean K. Bui
Author Affiliations +
Abstract
For many areas of acoustics, standards organizations or regulatory bodies have mandated vibration or noise criteria and defined the appropriate processing methods. No such standards exist for vibration-sensitive facilities at this time except as defined by equipment manufacturers, facility owners, and/or vibration consultants. The existing criteria from these groups differ widely in form. This paper reviews the various candidate methods offered by current technology for processing measured vibration data.
© (1992) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hal Amick and Sean K. Bui "Review of several methods for processing vibration data", Proc. SPIE 1619, Vibration Control in Microelectronics, Optics, and Metrology, (1 February 1992); https://doi.org/10.1117/12.56844
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CITATIONS
Cited by 11 scholarly publications.
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KEYWORDS
Microelectronics

Vibration control

Metrology

Microscopes

Statistical analysis

Velocity measurements

Manufacturing

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