Benzocyclobutene as a planarization resin for flat panel displays

Donald J. Perettie; Mike F. McCulloch; Phil E. Garrou

doi:10.1117/12.60402

15 June 1992 Benzocyclobutene as a planarization resin for flat panel displays

Donald J. Perettie, Mike F. McCulloch, Phil E. Garrou

Proceedings Volume 1665, Liquid Crystal Materials, Devices, and Applications; (1992) https://doi.org/10.1117/12.60402
Event: SPIE/IS&T 1992 Symposium on Electronic Imaging: Science and Technology, 1992, San Jose, CA, United States

Abstract

Benzocyclobutene (BCB) is being developed to planarize both substrate glass, color filters and active devices for flat panel displays. In addition, the material is being evaluated as the alignment layer and acceptable pre-tilt angles are reported. The results of the current study have shown the BCB to exhibit superior planarization to polyimide with efficiencies 90. As an example, a typical P-V (peak-valley) of a color filter is reduced from about 1.4 (mu) initially to about 1200 angstroms with the application of 1.2 (mu) of BCB. In addition to efficiently smoothing the color filters, the BCB can also be employed to planarize the substrate glass, while acting as a Na+ barrier. For this particular example, the BCB coated glass is subjected to ITO deposition and the resultant film still exhibits excellent optical clarity with transmissions of approximately 92 respectively before and after ITO. The glass substrate is also efficiently planarized to the point that the directionality of the float direction becomes ambiguous.

Citation Download Citation

Donald J. Perettie, Mike F. McCulloch, and Phil E. Garrou "Benzocyclobutene as a planarization resin for flat panel displays", Proc. SPIE 1665, Liquid Crystal Materials, Devices, and Applications, (15 June 1992); https://doi.org/10.1117/12.60402

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