YBa2Cu307 superconducting microbolometer linear arrays

Burgess R. Johnson; Thomas R. Ohnstein; Holly A. Marsh; Scott B. Dunham; Paul W. Kruse

doi:10.1117/12.137815

1 September 1992 YBa₂Cu₃0₇ superconducting microbolometer linear arrays

Burgess R. Johnson, Thomas R. Ohnstein, Holly A. Marsh, Scott B. Dunham, Paul W. Kruse

Proceedings Volume 1685, Infrared Detectors and Focal Plane Arrays II; (1992) https://doi.org/10.1117/12.137815
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

Single pixels and linear arrays of microbolometers employing the high-T_c superconductor YBa₂Cu₃O₇ have been fabricated by silicon micromachining techniques. The substrates are 3 in. diameter silicon wafers upon which buffer layers of Si₃N₄ and yttria-stabilized zirconia (YSZ) have been deposited. The YBa₂Cu₃O₇ was deposited by ion beam sputtering upon the yttria-stabilized zirconia (YSZ), then photolithographically patterned into serpentines 4 micrometers wide. Anisotropic etching in KOH removed the silicon underlying each pixel, thereby providing the necessary thermal isolation. When operated at 70 degree(s)K with 1 (mu) A dc bias, the D^* is 7.5 X 10⁸ cm Hz^1/2/Watt with a thermal response time of 24 msec.

Citation Download Citation

Burgess R. Johnson, Thomas R. Ohnstein, Holly A. Marsh, Scott B. Dunham, and Paul W. Kruse "YBa₂Cu₃0₇ superconducting microbolometer linear arrays", Proc. SPIE 1685, Infrared Detectors and Focal Plane Arrays II, (1 September 1992); https://doi.org/10.1117/12.137815

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