Integrated microgyroscope

Timothy J. Hawkey; Richard P. Torti

doi:10.1117/12.138139

1 July 1992 Integrated microgyroscope

Timothy J. Hawkey, Richard P. Torti

Proceedings Volume 1694, Sensors and Sensor Systems for Guidance and Navigation II; (1992) https://doi.org/10.1117/12.138139
Event: Aerospace Sensing, 1992, Orlando, FL, United States

Abstract

A feasibility study was conducted of a prototype electrostatically suspended micromechanical two-axis gyroscope on a microchip, which is expected to find many applications in commercial, aerospace, and military sectors. Particular attention is given to the microfabrication techniques used for this device, the specifications and the configuration of the gyroscope, the configurations of the motor and the sensor, the electromechanical design, and the control and electronics design. Results of the feasibility study were very promising.

Citation Download Citation

Timothy J. Hawkey and Richard P. Torti "Integrated microgyroscope", Proc. SPIE 1694, Sensors and Sensor Systems for Guidance and Navigation II, (1 July 1992); https://doi.org/10.1117/12.138139

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