Soft x-ray microscopy with a 182-angstrom soft x-ray laser

Darrell S. DiCicco; Dong-Su Kim; Leonid Polonskiy; Charles H. Skinner; Szymon Suckewer

doi:10.1117/12.138757

13 January 1993 Soft x-ray microscopy with a 182-angstrom soft x-ray laser

Darrell S. DiCicco, Dong-Su Kim, Leonid Polonskiy, Charles H. Skinner, Szymon Suckewer

Proceedings Volume 1741, Soft X-Ray Microscopy; (1993) https://doi.org/10.1117/12.138757
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

The high brightness and short pulse duration of soft x-ray lasers provide unique advantages for x-ray microscopy. We briefly review soft x-ray laser development at Princeton University and present results from the development of novel soft x-ray microscopes. The Princeton soft x- ray laser at 18.2 nm has been used to record high resolution contact images of biological specimens. More recently we have demonstrated proof-of-principle of reflection imaging in the soft x-ray wavelength range with the first results from a soft x-ray reflection imaging microscope. The microscope used a Schwarzschild objective with Mo/Si multilayer mirrors (normal incidence reflectivity of approximately 20% per surface) to form an image in reflected 18.2 nm soft x rays. In a separate experiment a novel `diffraction plate,' designed as an alternative to conventional condenser optics, has been tested.

Citation Download Citation

Darrell S. DiCicco, Dong-Su Kim, Leonid Polonskiy, Charles H. Skinner, and Szymon Suckewer "Soft x-ray microscopy with a 182-angstrom soft x-ray laser", Proc. SPIE 1741, Soft X-Ray Microscopy, (13 January 1993); https://doi.org/10.1117/12.138757

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available