Soft x-ray reflectometry program at the National Insitute of Standards and Technology

Richard N. Watts; Thomas B. Lucatorto; Charles Tarrio

doi:10.1117/12.140570

21 January 1993 Soft x-ray reflectometry program at the national institute of standards and technology

Richard N. Watts, Thomas B. Lucatorto, Charles Tarrio

Proceedings Volume 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography; (1993) https://doi.org/10.1117/12.140570
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

In response to the metrology needs of the soft X-ray community, the National Institute of Standards and Technology (NIST) has initiated a program devoted to the characterization of multilayer coated optics in the 4-40 nm wavelength region. In this paper, we describe the synchrotron based XUV reflectometers in use and under construction at NIST. We review the characteristics of the Synchrotron Ultraviolet Radiation Facility storage ring (SURF II) discuss the capabilities of the existing reflectometry facility, and present the final design parameters, expected performance, and construction status of a new reflectometry beam line.

Citation Download Citation

Richard N. Watts, Thomas B. Lucatorto, and Charles Tarrio "Soft x-ray reflectometry program at the national institute of standards and technology", Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); https://doi.org/10.1117/12.140570

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